FEI Quanta FEG 250
Large stage environmental SEM with BF/DF STEM detector
Specifications:
- High vacuum
- 0.8 nm at 30 kV (STEM), 3.0 nm at 1 kV (SE)
- High vacuum with beam deceleration
- 3.0 nm at 1 kV (BD mode + BSE),3.1 nm at 200 V
- Low and Extended vacuum mode up to 1000 Pa (ESEM)
- 1.4 nm at 30 kV (SE)
- Temperature control range -25° to +55°
- EDAX chemical analysis including elemental and phase mapping